Mumakore achangopfuura, nyika yangu yekunzwa tekinoroji iri kukura nekukurumidza, uye minda yayo yekushandisa iri kuwedzerawo. Semhando yakakura kwazvo yekuyera kwemazuva ano kuyerwa, tekinoroji matsva, zvinhu zvitsva uye maitiro matsva anogara achipera mumunda wekumanikidza sensors
Iyo yekumanikidza sensor chishandiso chinoshandiswa kuona kumanikidza masaini uye usashandure mumagetsi emagetsi zvichienderana nemimwe mitemo. Izvo zvinowanzoshandiswa zvakanyanya mukugadzirwa kwakasiyana-siyana, maindasitiri uye eystems. ° C) ichakundikana, zvichikonzera mukumanikidza kuyerwa kutadza. Naizvozvo, iyo yakakwira tembiricha yekumanikidza sensor inova nzira yakakosha yekutsvaga yekutsvaga.
Kuiswa kwekushisa kwakanyanyaDzvinyiriro Sensors
Maererano nezvinhu zvakasiyana zvinoshandiswa, zvakakwirira-kudzvinyirira sensors inogona kukamurwa muPolysicaron uye tarisiro dze soi high-tembiricha kumanikidza sensors yakanaka kwazvo. Izvi zvinotevera zvinonyanya kuburitsa iyo soi yakakwira tembiricha yekumanikidza sensor.
Soi yakakwira tembiricha yekumanikidza sensor
Kusimudzira kwe soi high-tembiricha yekumanikidza nyanzvi kunonyanya kuve nekukwira kweSEF. Kuvandudza kuvimbika kwechidzitiro chekushandisa, nekuda kwehunhu hwakanyanya-tembiricha hwe soi chishandiso chesvomhu, chinova zvinhu zvakanakira kugadzirira kupisa-tembiricha yekumanikidza.
Parizvino, soi high-temport sensors yakabudirira kukudziridzwa kunze kwenyika, uye tembiricha yekushandira ndeye -55 ° C; The -5 ~ Iyo SoI High-tembiricha yekumanikidza sensor yakagadziriswa zvakare ine tembiricha inopfuura mazana mana ° Coly-tembired Unders, Tianjin University, uye Peking University. Uye zvakare, ramangwana remangwana rakakwira
Kushanda kwehunyanzvi kweSEI HWESI Tembiricha yekumanikidza Sensor
Mune nheyo, iyo soi yakakwira tembiricha yekumanikidza inonyanya kushandisa piezolesistive mhedzisiro yerudzi rwekushamisika Layer kuumba goridhe bhiriji sezvakaratidzwa mumufananidzo 2 (a); Kumanikidza kudzokorodza bato kunoiswa pane iyo sub substrate layer kuti iite fungidziro yekumanikidza.
Mufananidzo 2 (A) GOATSTRE Bridge
Kana chimiro chekumanikidza-chakanangana-chinyararire chinochinja-chinja, kupokana kweiyo piezoresistor shanduko, uye kukosha kwekumanikidza kunoyerwa kuburikidza nehukama hwekubuda kwevhesi uye kukosha kwekupokana kwe piezoresistor.
Maitiro Ekudzvinyirira weSEI YEMAHARA Tembiricha yekumanikidza sensor
Iyo yekugadzirira maitiro e soi high-tembiricha yekumanikidza sensor inosanganisira akawanda emams mems maitiro. Dzimwe nhanho dzinokosha dzinounzwa muchidimbu pano kuti unzwisise maitiro eiyo sensor, kunyanya kusanganisira piezoresistor gadziriro, gadziriro yekutungamira, yekumanikidza-inogadzirira firimu, uye kudzvinyirira kamuri yekumanikidza.
Kiyi yekugadzirira kweVaristators iri mukutonga kweiyo doping yekusimbisa uye kuronga kwekutevera kwekutevera kuumba maitiro; Iyo simbi inotungamira layer inonyanya kushanda sekubatana kweiyo yegororo bhiriji; Kugadziriswa kwekumanikidza kwesimba kwakareruka kunonyanya kuvimba neiyo yakadzika silicon etching maitiro; Iko kurongedza kweiyo cavity kunowanzo kusiyana zvichienderana nekushandiswa kwekumanikidza sensor,
Sezvo pakaomeswa kakawanda-tembiricha sensors haigoni kusangana neyekudzvinyirira matsime ezvemusoro Rwiyo rwembamangwana pane soi high-tembiricha yekumanikidza sensors dzinofanira kutarisa kugadzikana kwenguva refu uye kuzvidza matambudziko ekuzvidzora munzvimbo dzakakwirira-dzimba dzekushambadzira uye nekuvandudza chokwadi cheanomanikidza sensors. chimiro.
Ehezve, kukwirisa kweiyo njere kunodawo manyorerwo-tembiricha yekudzvinyirira pamwe nedzimwe matekinoroji, uye yekuchengetedza ruzivo kune iyo sensor, kuitira kuti ive nyore kuita mishoni yekunzwa yakanyanya-tembiricha yemamiriro ekunze. .
Kutumira Nguva: Mar-03-2023